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Ch. 1 | Introduction to silicon carbide (SiC) microelectromechanical systems (MEMS) | 1 |
Ch. 2 | Deposition techniques for SiC MEMS | 18 |
Ch. 3 | Review of issues pertaining to the development of contacts to silicon carbide : 1996-2002 | 46 |
Ch. 4 | Dry etching of SiC | 102 |
Ch. 5 | Design, performance and applications of SiC MEMS | 128 |
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Add Silicon Carbide Microelectromechanical Systems for Harsh Environments, This book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the f, Silicon Carbide Microelectromechanical Systems for Harsh Environments to the inventory that you are selling on WonderClubX
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Add Silicon Carbide Microelectromechanical Systems for Harsh Environments, This book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the f, Silicon Carbide Microelectromechanical Systems for Harsh Environments to your collection on WonderClub |