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Foreword | ||
Preface | ||
Acknowledgments | ||
Pt. I | Getting Started | |
1 | Introduction | 3 |
2 | An Approach to Mems Design | 15 |
3 | Microfabrication | 29 |
4 | Process Integration | 79 |
Pt. II | Modeling Strategies | |
5 | Lumped Modeling | 103 |
6 | Energy-Conserving Transducers | 125 |
7 | Dynamics | 149 |
Pt. III | Domain-Specific Details | |
8 | Elasticity | 183 |
9 | Structures | 201 |
10 | Energy Methods | 239 |
11 | Dissipation and the Thermal Energy Domain | 267 |
12 | Lumped Modeling of Dissipative Processes | 299 |
13 | Fluids | 317 |
Pt. IV | Circuit and System Issues | |
14 | Electronics | 353 |
15 | Feedback Systems | 397 |
16 | Noise | 425 |
Pt. V | Case Studies | |
17 | Packaging | 453 |
18 | A Piezoresistive Pressure Sensor | 469 |
19 | A Capacitive Accelerometer | 497 |
20 | Electrostatic Projection Displays | 531 |
21 | A Piezoelectric Rate Gyroscope | 561 |
22 | DNA Amplification | 605 |
23 | A Microbridge Gas Sensor | 629 |
App. A- Glossary of Notation | 651 | |
App. B | Electromagnetic Fields | 657 |
App. C | Elastic Constants in Cubic Material | 663 |
References | 665 | |
Index | 677 |
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Add Microsystem Design, The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, Microsystem Design to the inventory that you are selling on WonderClubX
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Add Microsystem Design, The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, Microsystem Design to your collection on WonderClub |