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Microsystem Design Book

Microsystem Design
Microsystem Design, The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). 
The subject matter is wide-ranging: microfabrication, Microsystem Design has a rating of 4.5 stars
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Microsystem Design, The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, Microsystem Design
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  • Microsystem Design
  • Written by author Stephen D. Senturia
  • Published by Springer-Verlag New York, LLC, November 2000
  • The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication
  • This book is used for a graduate course in "Design and Fabrication of Microelectromechanical Devices (MEMS)" at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a usefu
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Book Categories

Authors

Foreword
Preface
Acknowledgments
Pt. IGetting Started
1Introduction3
2An Approach to Mems Design15
3Microfabrication29
4Process Integration79
Pt. IIModeling Strategies
5Lumped Modeling103
6Energy-Conserving Transducers125
7Dynamics149
Pt. IIIDomain-Specific Details
8Elasticity183
9Structures201
10Energy Methods239
11Dissipation and the Thermal Energy Domain267
12Lumped Modeling of Dissipative Processes299
13Fluids317
Pt. IVCircuit and System Issues
14Electronics353
15Feedback Systems397
16Noise425
Pt. VCase Studies
17Packaging453
18A Piezoresistive Pressure Sensor469
19A Capacitive Accelerometer497
20Electrostatic Projection Displays531
21A Piezoelectric Rate Gyroscope561
22DNA Amplification605
23A Microbridge Gas Sensor629
App. A- Glossary of Notation651
App. BElectromagnetic Fields657
App. CElastic Constants in Cubic Material663
References665
Index677


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Microsystem Design, The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). 
The subject matter is wide-ranging: microfabrication, Microsystem Design

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Microsystem Design, The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). 
The subject matter is wide-ranging: microfabrication, Microsystem Design

Microsystem Design

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Microsystem Design, The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). 
The subject matter is wide-ranging: microfabrication, Microsystem Design

Microsystem Design

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