Micromechatronics Book

CURRENT TRENDS FOR ACTUATORS AND MICROMECHATRONICS The Need for New Actuators Conventional Methods for Micropositioning An Overview of Solid-State Actuators Critical Design Concepts and the Structure of the Text

A THEORETICAL DESCRIPTION OF FIELD-INDUCED STRAINS Ferroelectricity Microscopic Origins of Electric Field Induced Strains Tensor/Matrix Description of Piezoelectricity Theoretical Description of Ferroelectric and Antiferroelectric Phenomena Phenomenology of Magnetostriction Ferroelectric Domain Reorientation Grain Size and Electric Field-Induced Strain in Ferroelectrics

ACTUATOR MATERIALS Practical Actuator Materials Figures of Merit for Piezoelectric Transducers The Temperature Dependence of the Electrostrictive Strain Response Speed Mechanical Properties of Actuators

CERAMIC ACTUATOR STRUCTURES AND FABRICATION METHODS Fabrication of Ceramics and Single Crystals Device Design Electrode Materials Commercially Available Piezoelectric and Electrostrictive Actuators

DRIVE / CONTROL TECHNIQUES FOR PIEZOELECTRIC ACTUATORS Classification of Piezoelectric Actuators Feedback Control Pulse Drive Resonance Drive Sensors and Specialized Components for Micromechatronic Systems

LOSS MECHANISMS AND HEAT GENERATION Hysteresis and Loss in Piezoelectrics Heat Generation in Piezoelectrics Hard and Soft Piezoelectrics

INTRODUCTION TO THE FINITE ELEMENT METHOD FOR PIEZOELECTRIC STRUCTURES Background Information Defining the Equations for the Problem Application of the Finite Element Method

SERVO DISPLACEMENT TRANSDUCER APPLICATIONS Deformable Mirrors Microscope Stages High Precision Linear Displacement Devices Servo Systems VCR Head Tracking Actuators Vibration Suppression and Noise Elimination Systems

PULSE DRIVE MOTOR APPLICATIONS Imaging System Applications Inchworm Devices Dot Matrix Printer Heads InkJet Printers Piezoelectric Relays Adaptive Suspension Systems

ULTRASONIC MOTOR APPLICATIONS General Description and Classification of Ultrasonic Motors Standing Wave Motors Mixed-Mode Motors Traveling Wave Motors Mode Rotation Motors Performance Comparison Among Various Ultrasonic Motors Microscale Walking Machines Calculations for the Speed and Thrust of Ultrasonic Motors Elements of Designing an Ultrasonic Motor Other Ultrasonic Motor Applications Magnetic Motors Reliability of Ultrasonic Motors

THE FUTURE OF CERAMIC ACTUATORS IN MICROMECHATRONIC SYSTEMS Development Trends as Viewed from Patent Statistics The Piezoelectric Actuator/Ultrasonic Motor Market Future Trends in Actuator Design INDEX