Microlithography: Science and Technology Book

Name: Microlithography: Science and Technology, , Microlithography: Sci
SKU: 9780824799533
Price: 199.95 USD
Availability: InStock
Rating: 3 (2 reviews)

2 Ratings

Microlithography: Science and Technology, , Microlithography: Science and Technology

3 out of 5 stars based on 2 reviews

Microlithography: Science and Technology
Written by author James R. Sheats
Published by Dekker, Marcel Inc., May 1998
This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discuss

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Preface
Ch. 1 System Overview of Optical Steppers and Scanners 1
Ch. 2 Optical Lithography Modeling 109
Ch. 3 Optics for Photolithography 171
Ch. 4 Krypton Fluoride Excimer Laser for Advanced Microlithography 271
Ch. 5 Alignment and Overlay 317
Ch. 6 Electron Beam Lithography Systems 367
Ch. 7 X-Ray Lithography 403
Ch. 8 Chemistry of Photoresist Materials 429
Ch. 9 Resist Processing 515
Ch. 10 Multilayer Resist Technology 567
Ch. 11 Dry Etching of Photoresists 615
Ch. 12 Critical Dimensional Metrology 645
Ch. 13 E-Beam and Proximal Probe Processes for Nanolithography 715
Index 777

Title: Microlithography: Science and Technology

Item Number: 9780824799533

Publication Date: May 1998

Number: 2

Product Description: Full Name: Microlithography: Science and Technology; Short Name:Microlithography

Universal Product Code (UPC): 9780824799533

WonderClub Stock Keeping Unit (WSKU): 9780824799533

Rating: 3/5 based on 2 Reviews

Image Location: https://wonderclub.com/images/covers/95/33/9780824799533.jpg

Category: Media >> Books

Weight: 0.200 kg (0.44 lbs)

Width: 0.000 cm (0.00 inches)

Heigh : 0.000 cm (0.00 inches)

Depth: 0.000 cm (0.00 inches)

Date Added: August 25, 2020, Added By: Ross

Date Last Edited: August 25, 2020, Edited By: Ross

Price	Condition	Delivery	Seller	Action
$199.95	Digital	Arrives between May 5 - Jun 4 Login to your account for a direct download. Some files are emailed from Dropbox. Continent $0.00 - World $0.00	WonderClub (9296 total ratings)

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	Preface
Ch. 1	System Overview of Optical Steppers and Scanners	1
Ch. 2	Optical Lithography Modeling	109
Ch. 3	Optics for Photolithography	171
Ch. 4	Krypton Fluoride Excimer Laser for Advanced Microlithography	271
Ch. 5	Alignment and Overlay	317
Ch. 6	Electron Beam Lithography Systems	367
Ch. 7	X-Ray Lithography	403
Ch. 8	Chemistry of Photoresist Materials	429
Ch. 9	Resist Processing	515
Ch. 10	Multilayer Resist Technology	567
Ch. 11	Dry Etching of Photoresists	615
Ch. 12	Critical Dimensional Metrology	645
Ch. 13	E-Beam and Proximal Probe Processes for Nanolithography	715
	Index	777