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Pt. I | Introduction | 1 |
1 | Introduction | 3 |
2 | Micrometrology and materials characterization | 17 |
3 | Simulation of microfabrication processes | 27 |
Pt. II | Materials | 33 |
4 | Silicon | 35 |
5 | Thin film materials and processes | 47 |
6 | Epitaxy | 65 |
7 | Thin-film growth and structure | 73 |
Pt. III | Basic Processes | 91 |
8 | Pattern generation | 93 |
9 | Optical lithography | 99 |
10 | Lithographic patterns | 107 |
11 | Etching | 119 |
12 | Wafer cleaning and surface preparation | 133 |
13 | Thermal oxidation | 143 |
14 | Diffusion | 153 |
15 | Ion implantation | 159 |
16 | CMP : Chemical-mechanical polishing | 165 |
17 | Bonding and layer transfer | 173 |
18 | Molding and stamping | 183 |
Pt. IV | Structures | 191 |
19 | Self-aligned structures | 193 |
20 | Plasma etched structures | 199 |
21 | Wet-etched silicon structures | 205 |
22 | Sacrificial and released structures | 217 |
23 | Structures by deposition | 227 |
Pt. V | Integration | 235 |
24 | Process integration | 237 |
25 | CMOS transistor fabrication | 255 |
26 | Bipolar technology | 269 |
27 | Multilevel metallization | 277 |
28 | MEMS process integration | 287 |
29 | Processing on non-silicon substrates | 301 |
Pt. VI | Tools | 307 |
30 | Tools for microfabrication | 309 |
31 | Tools for hot processes | 315 |
32 | Vacuum and plasmas | 321 |
33 | Tools for CVD and epitaxy | 329 |
34 | Integrated processing | 337 |
Pt. VII | Manufacturing | 341 |
35 | Cleanrooms | 343 |
36 | Yield | 349 |
37 | Wafer fab | 355 |
Pt. VIII | Future | 361 |
38 | Moore's law | 363 |
39 | Microfabrication at large | 373 |
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