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Book Categories |
Preface | ||
1 | Microelectromechanical Systems | 1 |
2 | Fundamental MEMS Device Physics | 25 |
3 | Fundamental MEMS Devices: The MEM Switch | 57 |
4 | Fundamental MEMS Devices: The MEM Resonator | 81 |
5 | Microwave MEMS Applications | 107 |
6 | MEMS-Based Microwave Circuits and Systems | 159 |
App. A | Surface Macromachining Process | 197 |
Glossary | 207 | |
About the Author | 209 | |
Index | 211 |
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