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Book Categories |
| Ch. 1 | Introduction | 1 |
| Ch. 2 | Introduction of microfabrication | 28 |
| Ch. 3 | Review of essential electrical and mechanical concepts | 48 |
| Ch. 4 | Electrostatic sensing and actuation | 103 |
| Ch. 5 | Thermal sensing and actuation | 153 |
| Ch. 6 | Piezoresistive sensors | 207 |
| Ch. 7 | Piezoelectric sensing and actuation | 245 |
| Ch. 8 | Magnetic actuation | 279 |
| Ch. 9 | Summary of sensing and actuation | 307 |
| Ch. 10 | Bulk micromachining and silicon anisotropic etching | 326 |
| Ch. 11 | Surface micromachining | 371 |
| Ch. 12 | Polymer MEMS | 397 |
| Ch. 13 | Microfluidics applications | 422 |
| Ch. 14 | Instruments for scanning probe microscopy | 455 |
| Ch. 15 | Optical MEMS | 486 |
| Ch. 16 | MEMS technology management | 509 |
| App | Frequently used formulas for beams and membranes |
| Price | Condition | Delivery | Seller | Action |
| $138.95 | Digital |
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Add Foundatons of Mems, For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to, Foundatons of Mems to the inventory that you are selling on WonderClubX
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Add Foundatons of Mems, For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to, Foundatons of Mems to your collection on WonderClub |