|
|
Sold Out
Book Categories |
| Preface | ||
| 1 | Chemical Mechanical Planarization - An Introduction | 1 |
| 2 | Historical Motivations for CMP | 15 |
| 3 | CMP Variables and Manipulations | 36 |
| 4 | Mechanical and Electrochemical Concepts for CMP | 48 |
| 5 | Oxide CMP Processes - Mechanisms and Models | 129 |
| 6 | Tungsten and CMP Processes | 181 |
| 7 | Copper CMP | 209 |
| 8 | CMP of Other Materials and New CMP Applications | 269 |
| 9 | Post-CMP Cleanup | 289 |
| Appendix | Problem Sets | 306 |
| Index | 317 |
| Price | Condition | Delivery | Seller | Action |
| $143.89 | Digital |
| WonderClub |
Hector Canpos
reviewed Chemical Mechanical Planarization of Microelectronic Materials on February 04, 2016
Chemical Mechanical Planarization of Microelectronic Materials
This is a collection of essays written for popular science magazines and compiled into a book which neither informs nor entertains. Though dated, the wild promises it makes in regards to nanotech for the near future (i.e., 5 years ago) don't seem very exciting in retrospect. Atkinson's book makes nanotech look like the cold fusion of the 2000s.
Login|Complaints|Blog|Games|Digital Media|Souls|Obituary|Contact Us|FAQ
CAN'T FIND WHAT YOU'RE LOOKING FOR? CLICK HERE!!! X
You must be logged in to add to WishlistX
This item is in your Wish List
X
This item is in your Collection
Chemical Mechanical Planarization of Microelectronic Materials
X
This Item is in Your Inventory
Chemical Mechanical Planarization of Microelectronic Materials
X
You must be logged in to review the productsX
X
X
Add Chemical Mechanical Planarization of Microelectronic Materials, Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relativ, Chemical Mechanical Planarization of Microelectronic Materials to the inventory that you are selling on WonderClubX
X
Add Chemical Mechanical Planarization of Microelectronic Materials, Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relativ, Chemical Mechanical Planarization of Microelectronic Materials to your collection on WonderClub |