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Book Categories |
Ch. 1 | Lithography | 1 |
Ch. 2 | Pattern Transfer with Dry Etching Techniques | 77 |
Ch. 3 | Pattern Transfer with Additive Techniques | 123 |
Ch. 4 | Wet Bulk Micromachining | 183 |
Ch. 5 | Surface Micromachining | 259 |
Ch. 6 | LIGA and Micromolding | 325 |
Ch. 7 | A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing | 379 |
Ch. 8 | Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice | 467 |
Ch. 9 | Scaling, Actuators, and Power in Miniaturized Systems | 535 |
Ch. 10 | Miniaturization Applications | 615 |
App. A | Metrology Techniques for MEMS | 669 |
App. B | Living Book | 671 |
App. C | Si and SiO[subscript 2] Etch Rates in KOH | 673 |
App. D | Genetics | 675 |
App. E: Suggested Further Reading | 679 | |
App. F | MEMS Companies | 685 |
App. G: Glossary | 687 | |
Index | 703 |
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Add Fundamentals of Microfabrication: The Science of Miniaturization, MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the techn, Fundamentals of Microfabrication: The Science of Miniaturization to the inventory that you are selling on WonderClubX
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Add Fundamentals of Microfabrication: The Science of Miniaturization, MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the techn, Fundamentals of Microfabrication: The Science of Miniaturization to your collection on WonderClub |