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Fundamentals of Microfabrication: The Science of Miniaturization Book

Fundamentals of Microfabrication: The Science of Miniaturization
Fundamentals of Microfabrication: The Science of Miniaturization, MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the techn, Fundamentals of Microfabrication: The Science of Miniaturization has a rating of 5 stars
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Fundamentals of Microfabrication: The Science of Miniaturization, MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the techn, Fundamentals of Microfabrication: The Science of Miniaturization
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  • Fundamentals of Microfabrication: The Science of Miniaturization
  • Written by author Marc J. Madou
  • Published by Taylor & Francis, Inc., March 2002
  • MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the techn
  • MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the techn
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Book Categories

Authors

Ch. 1Lithography1
Ch. 2Pattern Transfer with Dry Etching Techniques77
Ch. 3Pattern Transfer with Additive Techniques123
Ch. 4Wet Bulk Micromachining183
Ch. 5Surface Micromachining259
Ch. 6LIGA and Micromolding325
Ch. 7A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing379
Ch. 8Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice467
Ch. 9Scaling, Actuators, and Power in Miniaturized Systems535
Ch. 10Miniaturization Applications615
App. AMetrology Techniques for MEMS669
App. BLiving Book671
App. CSi and SiO[subscript 2] Etch Rates in KOH673
App. DGenetics675
App. E: Suggested Further Reading679
App. FMEMS Companies685
App. G: Glossary687
Index703


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Fundamentals of Microfabrication: The Science of Miniaturization, MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the techn, Fundamentals of Microfabrication: The Science of Miniaturization

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Fundamentals of Microfabrication: The Science of Miniaturization, MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the techn, Fundamentals of Microfabrication: The Science of Miniaturization

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Fundamentals of Microfabrication: The Science of Miniaturization, MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the techn, Fundamentals of Microfabrication: The Science of Miniaturization

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