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Introduction to Microfabrication Book

Introduction to Microfabrication
Introduction to Microfabrication, This book will provide coverage of all aspects of the attempt to build functional devices at a molecular size. Emphasis is placed upon general principles and technologies. Franssila provides coverage of specific devices, beginning with simple solar cells , Introduction to Microfabrication has a rating of 4.5 stars
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Introduction to Microfabrication, This book will provide coverage of all aspects of the attempt to build functional devices at a molecular size. Emphasis is placed upon general principles and technologies. Franssila provides coverage of specific devices, beginning with simple solar cells , Introduction to Microfabrication
4.5 out of 5 stars based on 2 reviews
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  • Introduction to Microfabrication
  • Written by author Sami Franssila
  • Published by Wiley, John & Sons, Incorporated, November 2010
  • This book will provide coverage of all aspects of the attempt to build functional devices at a molecular size. Emphasis is placed upon general principles and technologies. Franssila provides coverage of specific devices, beginning with simple solar cells
  • This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications,
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Book Categories

Authors

Pt. IIntroduction1
1Introduction3
2Micrometrology and materials characterization17
3Simulation of microfabrication processes27
Pt. IIMaterials33
4Silicon35
5Thin film materials and processes47
6Epitaxy65
7Thin-film growth and structure73
Pt. IIIBasic Processes91
8Pattern generation93
9Optical lithography99
10Lithographic patterns107
11Etching119
12Wafer cleaning and surface preparation133
13Thermal oxidation143
14Diffusion153
15Ion implantation159
16CMP : Chemical-mechanical polishing165
17Bonding and layer transfer173
18Molding and stamping183
Pt. IVStructures191
19Self-aligned structures193
20Plasma etched structures199
21Wet-etched silicon structures205
22Sacrificial and released structures217
23Structures by deposition227
Pt. VIntegration235
24Process integration237
25CMOS transistor fabrication255
26Bipolar technology269
27Multilevel metallization277
28MEMS process integration287
29Processing on non-silicon substrates301
Pt. VITools307
30Tools for microfabrication309
31Tools for hot processes315
32Vacuum and plasmas321
33Tools for CVD and epitaxy329
34Integrated processing337
Pt. VIIManufacturing341
35Cleanrooms343
36Yield349
37Wafer fab355
Pt. VIIIFuture361
38Moore's law363
39Microfabrication at large373


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Introduction to Microfabrication, This book will provide coverage of all aspects of the attempt to build functional devices at a molecular size. Emphasis is placed upon general principles and technologies. Franssila provides coverage of specific devices, beginning with simple solar cells , Introduction to Microfabrication

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