Lecture Notes on Principles of Plasma Processing Book

	Plasma Physics
Pt. A1	Introduction to Plasma Science
I	What is a plasma?	1
II	Plasma fundamentals	3
Pt. A2	Introduction to Gas Discharges
III	Gas discharge fundamentals	11
Pt. A3	Plasma Sources I
IV	Introduction to plasma sources	25
Pt. A4	Plasma Sources II
V	RIE discharges	31
Pt. A5	Plasma Sources III
VI	ECR sources	47
VII	Inductively coupled plasmas (ICPs)	49
Pt. A6	Plasma Sources IV
VIII	Helicon wave sources and HDPs	61
IX	Discharge equilibrium	69
Pt. A7	Plasma Diagnostics
X	Introduction	75
XI	Remote diagnostics	75
XII	Langmuir probes	79
XIII	Other local diagnostics	93
	Plasma Chemistry
Pt. B1	Overview of Plasma Processing in Microelectronics Fabrication
I	Plasma processing	99
II	Applications in Microelectronics	100
Pt. B2	Kinetic Theory and Collisions
I	Kinetic theory	103
II	Practical gas kinetic models and macroscopic properties	109
III	Collision dynamics	119
Pt. B3	Atomic Collisions and Spectra
I	Atomic energy levels	125
II	Atomic collisions	126
III	Elastic collisions	129
IV	Inelastic collisions	130
Pt. B4	Molecular Collisions and Spectra
I	Molecular energy levels	137
II	Selection rule for optical emission of molecules	139
III	Electron collisions with molecules	140
IV	Heavy particle collisions	142
V	Gas phase kinetics	143
Pt. B5	Plasma Diagnostics
I	Optical emission spectroscopy	151
II	Laser induced fluorescence	161
III	Laser interferometry	162
IV	Full-wafer interferometry	163
V	Mass spectrometry	164
Pt. B6	Plasma Surface Kinetics
I	Plasma chemistry	167
II	Surface reactions	167
III	Loading	177
IV	Selectivity	178
V	Detailed reaction modeling	179
Pt. B7	Feature Evolution and Modeling
I	Fundamentals of feature evolution in plasma etching	183
II	Predictive modeling	185
III	Mechanisms of profile evolution	186
IV	Profile simulation	190
V	Plasma damage	193
	Epilogue: Current Problems in Semiconductor Processing	199