Vacuum Mechatronics Book

	Preface	xi
Chapter 1	Introduction to Vacuum Mechatronics	1
Chapter 2	Vacuum Environment and Applications	11
2.1	Vacuum Fundamentals	11
2.2	Artificial Vacuum	12
2.3	Natural Vacuum	20
2.4	Vacuum: Advantages and Disadvantages	21
2.5	Applications	22
	Reprints
	The National Bureau of Standards Primary High-vacuum Standard	25
	How to Select High Vacuum Pumps	33
	Aluminum Alloy Ultrahigh Vacuum System for Molecular Beam Epitaxy	43
	Advances in Vacuum Contamination Control for Electronic Materials Processing	49
	Particle Control for Semiconductor Processing in Vacuum Systems	55
	Mechanisms of Contaminant Particle Production, Migration and Adhesion	63
	Control of Particulate Emissions from Plasma-Etching Systems	69
	Vacuum Systems for Microelectronics	75
	Manufacturing in a Vacuum Environment	81
Chapter 3	Vacuum Mechatronics Fundamentals	87
3.1	Materials	87
3.2	Lubrication	96
3.3	Energy Transfer	105
	Reprints
	Space Environment and Vacuum Properties of Spacecraft Materials	111
	Materials for Ultrahigh Vacuum	119
	Analysis of Outgassing Characteristics of Metals	135
	Lubricating of Mechanisms for Vacuum Service	139
	Considerations of the Lubrication of Spacecraft Mechanisms	145
	Contact Heat Transfer-The Last Decade	165
Chapter 4	Vacuum Mechatronics Components	179
4.1	Actuators	179
4.2	Sensors	185
4.3	Energy Transmission	189
4.4	Machine Elements	193
4.5	Magnetic Levitation	196
	Reprints
	Ultrahigh Vacuum Line Components	203
	Ultrahigh Vacuum Leak Sealing with a Silicon Resin Product	215
	A Simple Ultrahigh Vacuum Shape Memory Effect Shutter Mechanism	217
	Robotic Joint Experiments Under Ultravacuum	219
Chapter 5	Vacuum Mechatronics Control	237
5.1	Introduction	237
5.2	Basic Issues	239
5.3	Selected Papers	242
	Reprints
	Approach to the Dynamically Reconfigurable Robotic Systems	245
	The Central Nervous System as a Low and High Level Control System	263
	Logical Sensor Systems	281
Chapter 6	Vacuum Mechatronic Systems and Applications	307
6.1	System Components	307
6.2	Applications for Microelectronics	310
6.3	Applications for Space	311
6.4	Other Applications	312
6.5	The Future of Vacuum Mechatronics	313
	Reprints
	Canadarm and the Space Shuttle	315
	Six Mechanisms Used on the SSM/I Radiometer	323
	UHV Technique for Intervacuum Sample Transfer	339
	Versatile UHV Sample Transfer System	347
	Piezodriven Spindle for a Specimen Holder in the Vacuum Chamber of a Scanning Electron Microscope	351
	Precision Table for Ultrahigh Vacuum Made of Aluminum Alloys	355
	Extended Travel Ultrahigh Vacuum Sample Manipulator with two Orthogonal, Independent Rotations	359
Appendix A	Vacuum Mechatronic Components and Companies	363
Appendix B	Unit Conversion Factors	365
Appendix C	First International Vacuum Mechatronics Workshop	367
	Reprint Acknowledgements	369
	Index	373