Nanolithography and Patterning Techniques in Microelectronics Book

The distinguished international team of contributors examine the new range of techniques that have made it possible to develop complex patterns at the nanoscale level and explore their industrial applications in this book. Chapters consider ways of forming and modifying surfaces for patterning and provides information on specific patterning techniques such as soft lithography, ion beam patterning, use of nanostencils, photolithography, and inkjet printing. They also discuss prototyping and the manufacture of particular devices.