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Micro-Optics and Lithography Book

Micro-Optics and Lithography
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Micro-Optics and Lithography, This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics. Special attention is given to new techniques in, Micro-Optics and Lithography
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  • Micro-Optics and Lithography
  • Written by author Maria Kufner, Stefan Kufner
  • Published by VUB Brussels University Press, 6/1/1997
  • This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics. Special attention is given to new techniques in
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Book Categories

Authors

Introduction 9
Transition from Macro-optics to Micro-optics 13
Basics of Lithography 23
Diffractive Optics 41
Guided Wave Optics - Integrated Optics 61
Micro-optics in Photosensitive Glass 81
Gradient Index Components 91
Melting of Photoresist 113
Excimer Laser for Micro-optics 125
Deep Etch Lithography with Synchrotron Radiation - LIGA 137
Deep Proton Lithography 153
Conclusions 177
Appendix Testing of Micro-optical Elements 187


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Micro-Optics and Lithography, This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics. Special attention is given to new techniques in, Micro-Optics and Lithography

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Micro-Optics and Lithography, This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics. Special attention is given to new techniques in, Micro-Optics and Lithography

Micro-Optics and Lithography

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Micro-Optics and Lithography, This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics. Special attention is given to new techniques in, Micro-Optics and Lithography

Micro-Optics and Lithography

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