Methodology For The Modeling And Simulation Of Microsystems Book

	List of Figures
	List of Tables
	Contributing Authors
	Editors Preface
	Foreword
	Preface
1	Introduction	1
2	Data exchange formats	11
	Data exchange standards and STEP	12
	Vhdl 1076.1	13
	Towards a microsystem application protocol	14
	An investigation in data exchange	16
3	Energy-based macro-models	23
	Generalized variables	24
	Deriving HDL-A models of transducers	28
	Comparison of equivalent circuit and HDL models	31
4	Physical parameter extraction	37
	Field solvers	37
	The finite element method	38
	Analogies between FE and SPICE analysis domains	40
	Extraction of generalized variables	41
	Extraction of physical macro parameters	45
	The PXT physical parameter extractor	51
5	Analog HDL modeling techniques	61
	Modeling principles	62
	Conservative systems	64
	Piecewise linear models	71
	Signal flow models	71
	Piecewise defined behavior	78
6	Simulation examples	89
	Wobble electrostatic micromotor	89
	Electro-magnetic displacement sensor	100
	Vertical Hall Device	106
7	Conclusions	115
	App. A: Glossary of Abbreviations	118
	App. B: Glossary of VHDL 1076.1 Syntax	121
	References	123
	Index	135