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Book Categories |
| Preface | ||
| Introduction | ||
| Fabrication overview | 1 | |
| 1 | Some electrical properties of silicon | 12 |
| 2 | Dielectric layers | 23 |
| 3 | Semiconducting layers | 37 |
| 4 | Diffusion | 45 |
| 5 | Ion implantation | 60 |
| 6 | Process simulation | 67 |
| 7 | Photolithography | 78 |
| 8 | Metallization | 88 |
| 9 | Quality and reliability | 97 |
| 10 | VLSI technology overview | 111 |
| 11 | The bipolar transistor | 125 |
| 12 | Diodes, resistors and capacitors | 153 |
| 13 | Bipolar circuit elements | 166 |
| 14 | The MOS capacitor | 196 |
| 15 | The MOS transistor | 207 |
| 16 | The MOS inverter | 226 |
| 17 | MOS circuits | 243 |
| Appendix 1 Summary of important constants, equations and graphs | 256 | |
| Appendix 2 Solution guide to end-of-chapter problems | 269 | |
| Index | 278 |
| Price | Condition | Delivery | Seller | Action |
| $99.99 | Digital |
| WonderClub |
Dan P Shuntich
reviewed Intro to VLSI Technology on May 29, 2016
Intro to VLSI Technology
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