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High Density Plasma Sources Book

High Density Plasma Sources
High Density Plasma Sources, This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin fil, High Density Plasma Sources has a rating of 3 stars
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High Density Plasma Sources, This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin fil, High Density Plasma Sources
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Digital Copy
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  • High Density Plasma Sources
  • Written by author Oleg A. Popov
  • Published by Elsevier Science, June 1996
  • This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin fil
  • This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin fil
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Book Categories

Authors

1Helicon Plasma Sources1
2Planar Inductive Sources76
3Electrostatically-Shielded Inductively-Coupled RF Plasma Sources100
4Very High Frequency Capacitive Plasma Sources149
5Surface Wave Plasma Sources191
6Microwave Plasma Disk Processing Machines251
7Electron Cyclotron Resonance Plasma Sources312
8Distributed ECR Plasma Sources380
Index426


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