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Book Categories |
1 | Helicon Plasma Sources | 1 |
2 | Planar Inductive Sources | 76 |
3 | Electrostatically-Shielded Inductively-Coupled RF Plasma Sources | 100 |
4 | Very High Frequency Capacitive Plasma Sources | 149 |
5 | Surface Wave Plasma Sources | 191 |
6 | Microwave Plasma Disk Processing Machines | 251 |
7 | Electron Cyclotron Resonance Plasma Sources | 312 |
8 | Distributed ECR Plasma Sources | 380 |
Index | 426 |
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Add High Density Plasma Sources, This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin fil, High Density Plasma Sources to the inventory that you are selling on WonderClubX
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Add High Density Plasma Sources, This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin fil, High Density Plasma Sources to your collection on WonderClub |