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Book Categories |
Preface |
Acknowledgments |
Materials Research Society Conference |
Proceedings Keynote Presentation Shift to Copper and Low-k at SEMATECH |
PART I: COPPER-BASED METALLIZATION TECHNOLOGIES |
PART II: CMP |
PART III: ADVANCED BARRIER TECHNOLOGIES |
PART IV: ADVANCED AI METALLIZATION |
PART V: LOW-k DIELECTRICS |
PART VI: SILICIDES AND ADVANCED DRAM METALLIZATION |
PART VII: INTEGRATION OF ADVANCED METALLIZATION MATERIALS |
Author Index |
Subject Index2 |
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