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Clusters of Interstitial Atoms in Silicon and Germanium Book

Clusters of Interstitial Atoms in Silicon and Germanium
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Clusters of Interstitial Atoms in Silicon and Germanium, The problem of the formation of interstitial atom clusters in Si and Ge crystals is treated in order to present useful results for the understanding of problems which may arise after implatation, thermal gettering, and thermal treatment of Si and Ge wafer, Clusters of Interstitial Atoms in Silicon and Germanium
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  • Clusters of Interstitial Atoms in Silicon and Germanium
  • Written by author A. L. Aseev
  • Published by Wiley, John & Sons, Incorporated, 11/29/1994
  • The problem of the formation of interstitial atom clusters in Si and Ge crystals is treated in order to present useful results for the understanding of problems which may arise after implatation, thermal gettering, and thermal treatment of Si and Ge wafer
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Pt. I Clusters of Interstitial Atoms in Metastable Configurations
Ch. 1 Structure of rod-like and (113)-defects
Ch. 2 Formation and growth of (113)-defects by in situ electron irradiation in a high-voltage electron microscope
Ch. 3 Shrinkage of rod-like and (113)-defects during electron irradiation in the high-voltage electron microscope
Pt. II Clusters of Interstitial Atoms as Dislocation-Type Defects
Ch. 4 Interaction of point defects with dislocations during electron irradiation in the high-voltage electron microscope
Ch. 5 Formation of dislocation loops after ion implantation of silicon crystals
Conclusions
Index of Photographs
Abbreviations
References


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Clusters of Interstitial Atoms in Silicon and Germanium, The problem of the formation of interstitial atom clusters in Si and Ge crystals is treated in order to present useful results for the understanding of problems which may arise after implatation, thermal gettering, and thermal treatment of Si and Ge wafer, Clusters of Interstitial Atoms in Silicon and Germanium

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Clusters of Interstitial Atoms in Silicon and Germanium, The problem of the formation of interstitial atom clusters in Si and Ge crystals is treated in order to present useful results for the understanding of problems which may arise after implatation, thermal gettering, and thermal treatment of Si and Ge wafer, Clusters of Interstitial Atoms in Silicon and Germanium

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Clusters of Interstitial Atoms in Silicon and Germanium, The problem of the formation of interstitial atom clusters in Si and Ge crystals is treated in order to present useful results for the understanding of problems which may arise after implatation, thermal gettering, and thermal treatment of Si and Ge wafer, Clusters of Interstitial Atoms in Silicon and Germanium

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