Polymeric Materials for Microelectronic Applications: Science and Technology Book

	Preface
1	Photophysics, Photochemistry, and Photo-optical Effects in Polymer Solids	2
2	Photochemistry of Liquid-Crystalline Polymers	13
3	Dissociative Electron Capture of Polymers with Bridging Acid Anhydrides: Matrix Isolation Electron Spin Resonance Study	27
4	Luminescence Study of Ion-Irradiated Aromatic Polymers	45
5	New Directions in the Design of Chemically Amplified Resists	52
6	Dual-Tone and Aqueous Base Developable Negative Resists Based on Acid-Catalyzed Dehydration	70
7	Importance of Donor-Acceptor Reactions for the Photogeneration of Acid in Chemically Amplified Resists	93
8	Acid Generation in Chemically Amplified Resist Films	110
9	Radiation-Induced Reactions of Onium Salts in Novolak	121
10	Polymeric Sulfonium Salts as Acid Generators for Excimer Laser Lithography	130
11	Application of Triaryl Phosphate to Photosensitive Materials: Photoreaction Mechanism of Triaryl Phosphate	139
12	Effect of Water on the Surface Insoluble Layer of Chemically Amplified Positive Resists	151
13	Thermal Properties of a Chemically Amplified Resist Resin	165
14	Modeling and Simulation of Chemically Amplified Resist Systems	176
15	Surface Imaging Using Photoinduced Acid-Catalyzed Formation of Polysiloxanes at Air-Polymer Interface	185
16	Surface Imaging for Applications to Sub-0.35-[mu]m Lithography	201
17	Molecular Design of Epoxy Resins for Microelectronics Packaging	220
18	Uniaxial and In-Plane Molecular Orientation of Polyimides and Their Precursor as Studied by Absorption Dichroism of Perylenebisimide Dye	234
19	Novel Photosensitive Polyimide Precursor Based on Polyisoimide Using Nifedipine as a Dissolution Inhibitor	242
20	Photochemical Behavior of Nifedipine Derivatives and Application to Photosensitive Polyimides	253
21	Waveguiding in High-Temperature-Stable Materials	272
22	Rodlike Fluorinated Polyimide as an In-Plane Birefringent Optical Material	283
23	Preparation of Polyphenylene and Copolymers for Microelectronics Applications	298
24	Charge-Carrier Generation and Migration in a Polydiacetylene Compound Studied by Pulse Radiolysis Time-Resolved Microwave Conductivity	316
25	Excitation Dynamics in Conjugated Polymers	328
26	Application of Polyaniline Films to Radiation Dosimetry	336
27	Present and Future of Fullerenes: C[subscript 60] and Tubules	343
28	Photoresponsive Liquid-Crystalline Polymers: Holographic Storage, Digital Storage, and Holographic Optical Components	357
29	Azimuthal Alignment Photocontrol of Liquid Crystals	365
30	Electronic Structure and UV Absorption Spectra of Permethylated Silicon Chains	376
31	Electronic Properties of Polysilanes	387
32	UV Photoelectron Spectroscopy of Polysilanes and Polygermanes
33	Radical Ions of Polysilynes	408
34	Optical Properties of Silicon-Based Polymers with Different Backbone Structures	425
35	Synthesis and Properties of Polysilanes Prepared by Ring-Opening Polymerization	433
36	New Synthesis and Functionalization of Photosensitive Poly(silyl ether) by Addition Reaction of Bisepoxide with Dichlorosilane	443
	Author Index	455
	Affiliation Index	456
	Subject Index	457