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Introduction to Microlithography Book

Introduction to Microlithography
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Introduction to Microlithography, Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic, Introduction to Microlithography
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  • Introduction to Microlithography
  • Written by author Larry F. Thompson, C. Grant Wilson, Murrae J. Bowden
  • Published by American Chemical Society, 1994/01/01
  • Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic
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Book Categories

Authors

An Introduction to Lithography, L.F. Thompson
The Lithographic Process: The Physics, M.J. Bowden
Organic Resist Materials, C.G. Willson
Resist Processing, L.F. Thompson
Plasma Etching, J.A. Mucha, D.W. Hess, and E.S. Aydil


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Introduction to Microlithography, 
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic, Introduction to Microlithography

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Introduction to Microlithography, 
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic, Introduction to Microlithography

Introduction to Microlithography

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Introduction to Microlithography, 
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic, Introduction to Microlithography

Introduction to Microlithography

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