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An Introduction to Lithography, L.F. Thompson
The Lithographic Process: The Physics, M.J. Bowden
Organic Resist Materials, C.G. Willson
Resist Processing, L.F. Thompson
Plasma Etching, J.A. Mucha, D.W. Hess, and E.S. Aydil
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Add Introduction to Microlithography, Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic, Introduction to Microlithography to the inventory that you are selling on WonderClubX
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Add Introduction to Microlithography, Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic, Introduction to Microlithography to your collection on WonderClub |