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Design, Test, and Microfabrication of MEMS and MOEMS: 30 March-1 April 1999, Paris, France Book

Design, Test, and Microfabrication of MEMS and MOEMS: 30 March-1 April 1999, Paris, France
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  • Design, Test, and Microfabrication of MEMS and MOEMS: 30 March-1 April 1999, Paris, France
  • Written by author Bernard Courtois, Society of Photo-Optical Instrumentation Engineers Staff, Selden B. Crary, Wolfgang Ehrfeld, Hiroyuki Fujita
  • Published by Bellingham, Washington, U.S.A.: Society of Photo Optical, 1999
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