17th IEEE International Conference on Micro Electro Mechanical Systems: Maastricht MEMS 2004 Technical Digest January 25-29, 2004 Book

	Welcome Address
	MEMS for Watches	1
	Sequential Self-Assembly by Controlling Interactive Forces Between Microparticles	5
	Towards Optimal Designs for Self-Alignment in Surface Tension Driven Mirco-Assembly	9
	A Mold and Transfer Technique for Lead-Free Fluxless Soldering and Application to Wafer-Level Low-Temperature Thin-Film Packages	13
	Polymer MEMS-Based Microgripper for Single Cell Manipulation	17
	Cell Addressing and Trapping Using Novel Optoelectronic Tweezers	21
	A Microfluidic Device for Electrofusion of Biological Membranes	25
	A Continuous Cell Separation Chip Using Hydrodynamic Dielectrophoresis Process	29
	Pinched Flow Fractionation (PFF) for Continuous Particle Separation in a Microfluidic Device	33
	Tunable Microdoublet Lens Array	37
	A Vertically-Supported Two-Axial Torsional Micromirror	41
	Diffraction Grating Scanner Using a Micromachined Resonator	45
	Electro-Static Trapping and Deposition of Nanoparticles in a Submicron Narrow Gap for a Lateral-Electrode Led	49
	Reactive Oxide Micro Molding of Diffractive Optical Elements in Glass and Transparent Ceramics	53
	A Surface Micromachined Light Modulator Based on Vanadium Dioxide Array	57
	Large Displacement Optical Switching Mechanism Using SMA Microactuator and Magnetic Latch	61
	MEMS-Based Direct Methanol Fuel Cells and Their Stacks Using a Common Electrolyte Sandwiched by Reinforced Microcolumn Electrodes	65
	A Full-Time Accelerated Vertical Comb-Driven Micromirror for High Speed 30-Degree Scanning	69
	A Scanning Mirror with Extremely High Resonance Frequency Upto 0.51MHz Using Both Torsion and Buckling Springs	73
	Ultra-Thin Multilayer Nanomembranes for Short Wavelength Deformable Optics	77
	Path-Invariant Fiber-Based Interferometric Scanners for Oct	81
	A Micro Optical Flying Head for a PCMCIA-Sized Optical Data Storage	85
	Fully Integrated Optical System for Lab-on-a-Chip Applications	89
	A Wide Range Linearly-Tunable Optical Filter Using Magnetic Actuation	93
	Integration of the Drie, MUMPs, and Bulk Micromachining for Superior Micro-Optical Systems	97
	High Fill-Factor Two-Axis Analog Micromirror Array for 1XN[superscript 2] Wavelength-Selective Switches	101
	The Structural-Color Based on the Mechanism of Butterfly Wing Coloring for Wide Viewing Angle Reflective Display	105
	Zero-Power Magnetometers with Remote Optical Interrogation	109
	Micromachined Alkali Atom Vapor Cells for Chip-Scale Atomic Clocks	113
	NiW-Micro Springs for Chip Connection	117
	Monolithic Integration of Microfluidic Channels and Optical Waveguides Using a Photodefinable Epoxy	121
	Conductive SU8-Silver Composite Photopolymer	125
	On-Chip Tensile Test for Epitaxial Polysilicon	129
	The Effects of Ionizing Radiation on Microelectromechanical Systems (MEMS) Actuators: Electrostatic, Electrothermal and Bimorph	133
	Force Dependence of RF MEMS Switch Contact Heating	137
	Investigation of Dielectric Degradation of Microwave Capacitive Microswitches	141
	Predictive Modeling of the Fatigue Phenomenon for Polycrystalline Structural Layers	145
	High-Cycle Fatigue Damage Evaluation for Micro-Nanoscale Single Crystal Silicon Under Bending and Tensile Stressing	149
	Nanometer-Thin Titania Films with Sam-Level Stiction and Superior Wear Resistance for Reliable MEMS Performance	153
	Direct Measurement Technique of Strain in XRD Tensile Test for Evaluating Poisson's Ratio of Micron-Thick Tin Films	157
	Parylene-Pyrolyzed Carbon for MEMS Applications	161
	A Micro Differential Thermal Analysis ([mu]DTA) System	165
	Atomic Force Microscopy Characterization of Electromechanical Properties of RF Acoustic Bulk Wave Resonators	169
	The Patterning of Glutaraldehyde-Crosslinked Gelatin	173
	Effect of Crystal Orientation on Fracture Strength and Fracture Toughness of Single-Crystal Silicon	177
	An AFM-Based Device for In-Situ Characterization of Nano-Wear	181
	Annealing Temperature Dependent Strength of Polysilicon Measured Using a Novel Tensile Test Structure	185
	Thermal Oxidation-Induced Strain in Silicon Nanobeams	189
	Silicon Carbide Membrane Relative Humidity Sensor with Aluminium Electrodes	193
	Highly Symmetric Tri-Axis Piezoelectric Bimorph Accelerometer	197
	Measurement of Taste and Smell Using Biomimetic Sensor	201
	Parylene Flexible Neural Probe with Micro Fluidic Channel	208
	Ion Liquid Chromatography On-A-Chip with Beads-Packed Parylene Column	212
	A Wireless Microsensor for Monitoring Flow and Pressure in a Blood Vessel Utilizing a Dual-Inductor Antenna Stent and Two Pressure Sensors	216
	A Bio-Solar Cell Powered by Sub-Cellular Plant Photosystems	220
	Bubble-Free Priming of Blind Channels	224
	New Concept and Fabrication of Surface Micro Machined Vertical Structure	229
	A Seat Microvalve Nozzle for Optimal Gas Flow Capacity at Large Controlled Pressure	233
	An Electromagnetic Micro Power Generator for Low-Frequency Environmental Vibrations	237
	Analysis and Experimental Verification of Thermal Drift in a Constant Temperature Control Type Three-Axis Accelerometer for High Temperatures with a Novel Composition of Wheatstone Bridge	241
	Modelling of the RF Self-Actuation of Electrostatic RF-MEMS Devices	245
	Pull-in Dynamics: Analysis and Modeling of the Transitional Regime	249
	A Novel Convex Corner Compensation for Wet Anisotropic Etching on (100) Silicon Wafer	253
	A Frequency-Tunable Microactuator with a Varied Comb-Width Profile	257
	A Unipolar Corona Discharge Microfabricated Ionizer Structure for Gases at Atmospheric Pressure and Composition	261
	Mechanical Response of Single Living Cells by Bio-MEMS Sensors	265
	Preparation of Microstructured Pellistors and Their Application for Fast Fuel Vapor Discrimination	268
	Planar Lipid Membrane Array for Membrane Protein Chip	272
	Pico Liter Dispenser with 128 Independent Nozzles for High Throughput Biochip Fabrication	276
	Droplet Based Micro Oscillating Flow-Through PCR Chip	280
	Digital Microflow Controllers Using Fluidic Digital-to-Analog Converters with Binary-Weighted Flow Resistor Network	284
	A Polymer-Based Microfluidic Controller	288
	Viscosity Effects on Micro Bubble Actuator in SSDNA Solutions	292
	Size-Dependent Flow Separation in Microchannels with Cavities	296
	Height Effect on Nucleation-Site Activity in Microchannel Convective Boiling	300
	High-Throughput Micro Capillary Electrophoresis Chip for Bio-Analytical Application Utilizing Multi-Wavelength Detection	304
	DNA Detection Based on Capacitive AL[subscript 2]O[subscript 3]/AL Microelectrodes	308
	Micro Catalytic Combustor with Tailored Porous Alumina	312
	High Energy Density Miniature Electrical and Thermal Power Source Using Catalytic Combustion of Butane	316
	Nanofluidic Flowmeter Using Carbon Sensing Element	322
	Low Cost Device for Precise Microliter Range Liquid Dispensing	326
	Protein Patterning with a PDMS Sieve	330
	An Integrated LC-ESI Chip with Electrochemical-Based Gradient Generation	334
	PCR-Slide: A Modular and Cascadable Platform for DNA Sample Processing with Integrated Nanolitre Dosage	338
	Microfluidic Impedance Spectroscopy Flow Cytometer: Particle Size Calibration	343
	Implantable Resonant Mass Sensor for Liquid Bio Chemical Sensing	347
	Digital Mos-Transistor-Based Microhotplate Array for Simultaneous Detection of Environmentally Relevant Gases	351
	Portable Digital Microfluidics Platform with Active but Disposable Lab-On-Chip	355
	Magnetic Handling of Droplet in Micro Chemical Analysis System Utilizing Surface Tension and Wettability	359
	MEMS Devices for Detecting Correspondence Between Mechanical Rotation and ATP Consumption in a Single Biomolecular Motor	363
	Microchip Flow Cytometer with Integrated Polymer Optical Elements for Measurement of Scattered Light	367
	Single Bio-Molecule Detection with Quantum Dots in a Microchannel	371
	A Low Voltage Single Cell Electroporator with a Microfabricated Sense-Porate Aperture	375