Metallization of Polymers 2 Book

	New Instrumentation
1	Surface Analysis Using Confocal Raman Micro-spectroscopy	1
2	Ellipsometric Characterization of the Optical Constants of Metals: Thin Film versus Nanoparticle	11
3	Ultra Thin Film Analysis Using the Thermo VG Scientifics Thetaprobe Instrument	23
4	Nanoindentation of Microsprings and Microcantilevers	35
	Low Permittivity Materials
5	Physical and Interfacial Properties of Low Permittivity Polymers: Cyclotene, SiLK and Ultra-Low K	43
6	Mechanical Properties of Cured Silk Low-K Dielectric Films	53
7	Plasma-Polymerized Fluoropolymer Thin Films for Microelectronic Applications	61
	Polymer Metallization
8	Fundamental Aspects of Polymer Metallization	73
9	The Study of Copper Clusters on Dow Cyclotene and Their Stability	97
10	Adsorption of Noble Metal Atoms on Polymers	107
11	Nucleation and Growth of Vapor-Deposited Metal Films on Self-Assembled Monolayers Studied by Multiple Characterization Probes	117
	Barrier Layers
12	Morphological Investigations of Low-k Polymer/Diffusion Barrier Interfaces for IC Metallization	127
13	Chemistry in the Initial Formation of Nitride Barriers on Low-K Dielectrics	141
14	Capabilities and Limitations of RBS to Characterize Hyper-Thin Silicon Compound on Various Polymeric Substrates	153
	Adhesion Enhancement
15	Surface Modifications by Ion-Assisted Reactions	165
16	Plasma and VUV Pretreatments of Polymer Surfaces for Adhesion Enhancement of Electrolessly Deposited Ni or Cu Films	191
	Index	207