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Book Categories |
Preface | ||
Introduction | ||
Fabrication overview | 1 | |
1 | Some electrical properties of silicon | 12 |
2 | Dielectric layers | 23 |
3 | Semiconducting layers | 37 |
4 | Diffusion | 45 |
5 | Ion implantation | 60 |
6 | Process simulation | 67 |
7 | Photolithography | 78 |
8 | Metallization | 88 |
9 | Quality and reliability | 97 |
10 | VLSI technology overview | 111 |
11 | The bipolar transistor | 125 |
12 | Diodes, resistors and capacitors | 153 |
13 | Bipolar circuit elements | 166 |
14 | The MOS capacitor | 196 |
15 | The MOS transistor | 207 |
16 | The MOS inverter | 226 |
17 | MOS circuits | 243 |
Appendix 1 Summary of important constants, equations and graphs | 256 | |
Appendix 2 Solution guide to end-of-chapter problems | 269 | |
Index | 278 |
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