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Specialty Gas Analysis: A Practical Guidebook Book

Specialty Gas Analysis: A Practical Guidebook
Specialty Gas Analysis: A Practical Guidebook, The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty g, Specialty Gas Analysis: A Practical Guidebook has a rating of 3 stars
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Specialty Gas Analysis: A Practical Guidebook, The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty g, Specialty Gas Analysis: A Practical Guidebook
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  • Specialty Gas Analysis: A Practical Guidebook
  • Written by author Jeremiah D. Hogan
  • Published by Wiley, John & Sons, Incorporated, December 1996
  • The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty g
  • The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty g
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Book Categories

Authors

Preface
Contributors
1A History of Gas Analysis1
2Humidity Measurement in Gases for Semiconductor Processing21
3The Chromatographic Analysis of Trace Atmospheric Gases43
4Ultrapure Sampling of Corrosive-Gas Cylinders81
5Determining Moisture in Corrosive Gas93
6Methods of Analysis Using Helium-Ionization and Discharge-Ionization Detector/Gas Chromatography111
7Ion Chromatography for Gas Analysis139
8Limit of Detection163
App. AHydrogen Calibration Data191
App. BLOD[subscript REG] Procedure192
Index197


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