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High Resolution Focused Ion Beams Book

High Resolution Focused Ion Beams
High Resolution Focused Ion Beams, , High Resolution Focused Ion Beams has a rating of 3 stars
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High Resolution Focused Ion Beams, , High Resolution Focused Ion Beams
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  • High Resolution Focused Ion Beams
  • Written by author Jon Orloff
  • Published by Springer-Verlag New York, LLC, September 2002
  • The book is subtitled "The physics of liquid metal ion sources and ion optics and their application to focused ion beam technology." The authors identify field ionization sources, explain the physics behind the liquid metal ion source (LMIS), and review c
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Book Categories

Authors

Introduction1
1Field Ionization Sources5
2Physics of Liquid Metal Ion Sources21
3Ion Optics for LMIS79
4Interaction of Ions with Solids123
5Practical Focused Ion Beam Optics and Systems147
6Applications of Focused Ion Beams205
App. 1Elements of the Theory of Field Desorption and Ionization291
App. 2Table of Sputter Yields295
Index297
About the Authors303


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