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Book Categories |
| Preface | ||
| Ion Implantation Physics | 1 | |
| Radiation Damage and Annealing in Ion Implantation | 69 | |
| Channeling Effects in Ion Implantation | 119 | |
| Process Simulation and Ion Implantation | 223 | |
| Ion Implantation Applications in CMOS Process Technology | 271 | |
| New Technologies for Ion Implantation | 363 | |
| Safety Considerations for Ion Implanters | 435 | |
| Ion Source Fundamentals | 455 | |
| Ion Source Operation and Maintenance in a Semiconductor Production Environment | 501 | |
| Photoresist and Particulate Problems | 555 | |
| Wafer Cooling and Wafer Charging in Ion Implantation | 599 | |
| Process Control for Ion Implantation | 647 | |
| Contamination Problems in Ion Implantation | 675 | |
| Subject Index | 693 |
| Price | Condition | Delivery | Seller | Action |
| $99.99 | Digital |
| WonderClub |
Loepoldo Perez
reviewed Handbook of Ion Implantation Technology on May 29, 2019
Handbook of Ion Implantation Technology
Even though this was a textbook for my class, I really enjoyed delving into some of the topics that this book touched upon. I really learned a lot about how interwoven my discpline really is with science and the social aspects of technology were eye opening.
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