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Principles of Lithography Book

Principles of Lithography
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Principles of Lithography, For readers who are unfamiliar with the area but have a solid foundation in basic physics and chemistry and elementary calculus, Levinson introduces the science of microlithography. He explains complex situations with simple models that describe most of t, Principles of Lithography
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  • Principles of Lithography
  • Written by author Harry J. Levinson
  • Published by SPIE Society of Photo-Optical Instrumentation Engi, 2001/05/01
  • For readers who are unfamiliar with the area but have a solid foundation in basic physics and chemistry and elementary calculus, Levinson introduces the science of microlithography. He explains complex situations with simple models that describe most of t
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For readers who are unfamiliar with the area but have a solid foundation in basic physics and chemistry and elementary calculus, Levinson introduces the science of microlithography. He explains complex situations with simple models that describe most of the relevant physics, and considers the remaining effects as perturbations. Among the more advanced topics he tackles are light sources, photomasks, next-generation lithography, overlay, and photoresists. Annotation c. Book News, Inc., Portland, OR (booknews.com)


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Principles of Lithography, For readers who are unfamiliar with the area but have a solid foundation in basic physics and chemistry and elementary calculus, Levinson introduces the science of microlithography. He explains complex situations with simple models that describe most of t, Principles of Lithography

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Principles of Lithography, For readers who are unfamiliar with the area but have a solid foundation in basic physics and chemistry and elementary calculus, Levinson introduces the science of microlithography. He explains complex situations with simple models that describe most of t, Principles of Lithography

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Principles of Lithography, For readers who are unfamiliar with the area but have a solid foundation in basic physics and chemistry and elementary calculus, Levinson introduces the science of microlithography. He explains complex situations with simple models that describe most of t, Principles of Lithography

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