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Microsensors : Principles and Applications Book

Microsensors : Principles and Applications
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Microsensors : Principles and Applications, The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the proc, Microsensors : Principles and Applications
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  • Microsensors : Principles and Applications
  • Written by author J. W. Gardner
  • Published by Wiley, John & Sons, Incorporated, 8/1/1994
  • The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the proc
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Book Categories

Authors

Preface
1 Introduction 1
2 Sensor Signals and Interfacing 19
3 Conventional Silicon Processing 36
4 Specialised Materials Processing 59
5 Thermal Microsensors 79
6 Radiation Microsensors 117
7 Mechanical Microsensors 146
8 Magnetic Microsensors 199
9 (Bio)chemical Microsensors 224
10 Microsensor Performance 250
11 Smart Sensors 269
12 Microsensor Array Devices 279
Appendices 303
A. List of Symbols 303
B. Selected Definitions and Acronyms 309
C. List of Base SI Units 314
D. Unit Prefixes for SI Units 315
E. Table of Laplace Transforms and Operations 316
F. Unit Conversion Factors 317
G. Fundamental Constants 318
Index 319


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Microsensors : Principles and Applications, The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the proc, Microsensors : Principles and Applications

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Microsensors : Principles and Applications, The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the proc, Microsensors : Principles and Applications

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Microsensors : Principles and Applications, The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the proc, Microsensors : Principles and Applications

Microsensors : Principles and Applications

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