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| Preface | ||
| Dedication | ||
| Acknowledgments | ||
| Fundamental Electron-Molecule Interactions and Their Technological Significance | 1 | |
| 1 | Introduction | 1 |
| 2 | Low Energy Electron-Molecule Interaction Processes | 2 |
| 3 | Significance of Electron-Molecule Interactions in Plasma Processing | 37 |
| 4 | The Present Work | 47 |
| Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients | 61 | |
| 1 | Introduction | 61 |
| 2 | Collision Cross Sections | 62 |
| 3 | Coefficients and Rate Constants | 87 |
| 4 | Boltzmann-Code-Generated Collision Cross-Section Sets | 100 |
| Synthesis and Assessment of Electron Collision Data | 113 | |
| 1 | Introduction | 113 |
| 2 | Synthesis, Assessment, and Recommendation of Data | 113 |
| 3 | Deduction of Unavailable Data and Understanding from Assessed Data, New Measurements, and Data Needs | 121 |
| 4 | Dissemination and Updating of the Database | 129 |
| Electron Interactions with CF[subscript 4], C[subscript 2]F[subscript 6], and C[subscript 3]F[subscript 8] | 135 | |
| 1 | Introduction | 135 |
| 2 | Electron Interactions with CF[subscript 4] | 136 |
| 3 | Electron Interactions with C[subscript 2]F[subscript 6] | 220 |
| 4 | Electron Interactions with C[subscript 3]F[subscript 8] | 269 |
| Electron Interactions with CHF[subscript 3], CF[subscript 3]I, and c-C[subscript 4]F[subscript 8] | 335 | |
| 1 | Introduction | 335 |
| 2 | Electron Interactions with CHF[subscript 3] | 335 |
| 3 | Electron Interactions with CF[subscript 3]I | 372 |
| 4 | Electron Interactions with c-C[subscript 4]F[subscript 8] | 399 |
| Electron Interactions with Cl[subscript 2], CCl[subscript 2]F[subscript 2], BCl[subscript 3], and SF[subscript 6] | 449 | |
| 1 | Introduction | 449 |
| 2 | Electron Interactions with Cl[subscript 2] | 449 |
| 3 | Electron Interactions with CCl[subscript 2]F[subscript 2] | 516 |
| 4 | Electron Interactions with BCl[subscript 3] | 574 |
| 5 | Electron Interactions with SF[subscript 6] | 610 |
| Index | 765 |
| Price | Condition | Delivery | Seller | Action |
| $229.00 | Digital |
| WonderClub |
Andrew May
reviewed Fundamental Electron Interactions With Plasma Processing Gases on September 14, 2019 Fundamental Electron Interactions With Plasma Processing Gases
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